Issued Patents 2004
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822535 | Film bulk acoustic resonator structure and method of making | Qing Ma, Li-Peng Wang | 2004-11-23 |
| 6816035 | Forming film bulk acoustic resonator filters | Qing Ma, Li-Peng Wang | 2004-11-09 |
| 6812814 | Microelectromechanical (MEMS) switching apparatus | Qing Ma, John Heck, Li-Peng Wang, Dong-sik Shim, Quan Tran | 2004-11-02 |
| 6808954 | Vacuum-cavity MEMS resonator | Qing Ma, Peng Cheng | 2004-10-26 |
| 6787970 | Tuning of packaged film bulk acoustic resonator filters | Dong-sik Shim, Jose Maiz, Li-Peng Wang, Qing Ma | 2004-09-07 |
| 6753639 | Micro-electromechanical structure resonator frequency adjustment using radiant energy trimming and laser/focused ion beam assisted deposition | Qing Ma, Peng Cheng | 2004-06-22 |
| 6713314 | Hermetically packaging a microelectromechanical switch and a film bulk acoustic resonator | Daniel ManHung Wong, John Heck | 2004-03-30 |
| 6706981 | Techniques to fabricate a reliable opposing contact structure | Qing Ma, Kramadhati V. Ravi | 2004-03-16 |
| 6686820 | Microelectromechanical (MEMS) switching apparatus | Qing Ma, John Heck, Li-Peng Wang, Dong-sik Shim, Quan Tran | 2004-02-03 |
| 6673697 | Packaging microelectromechanical structures | Qing Ma, Li-Peng Wang, John Heck, Quan Tran | 2004-01-06 |