Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822535 | Film bulk acoustic resonator structure and method of making | Qing Ma, Valluri Rao | 2004-11-23 |
| 6816035 | Forming film bulk acoustic resonator filters | Qing Ma, Valluri Rao | 2004-11-09 |
| 6812814 | Microelectromechanical (MEMS) switching apparatus | Qing Ma, Valluri Rao, John Heck, Dong-sik Shim, Quan Tran | 2004-11-02 |
| 6787970 | Tuning of packaged film bulk acoustic resonator filters | Dong-sik Shim, Jose Maiz, Qing Ma, Valluri Rao | 2004-09-07 |
| 6686820 | Microelectromechanical (MEMS) switching apparatus | Qing Ma, Valluri Rao, John Heck, Dong-sik Shim, Quan Tran | 2004-02-03 |
| 6673697 | Packaging microelectromechanical structures | Qing Ma, Valluri Rao, John Heck, Quan Tran | 2004-01-06 |