Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821894 | CMP process | Peter Lahnor | 2004-11-23 |
| 6693022 | CVD method of producing in situ-doped polysilicon layers and polysilicon layered structures | Joerg Dreybrodt, Dirk Drescher, Ralf Zedlitz | 2004-02-17 |