Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6693022 | CVD method of producing in situ-doped polysilicon layers and polysilicon layered structures | Dirk Drescher, Ralf Zedlitz, Stephan Wege | 2004-02-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6693022 | CVD method of producing in situ-doped polysilicon layers and polysilicon layered structures | Dirk Drescher, Ralf Zedlitz, Stephan Wege | 2004-02-17 |