Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809800 | Apparatus for patterning a semiconductor wafer | Oliver Genz, Jurgen Preuninger | 2004-10-26 |
| 6727989 | Enhanced overlay measurement marks for overlay alignment and exposure tool condition control | Xiaoming Yin, Christopher Gould | 2004-04-27 |