Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809800 | Apparatus for patterning a semiconductor wafer | Jurgen Preuninger, Gerhard Kunkel | 2004-10-26 |
| 6740594 | Method for removing carbon-containing polysilane from a semiconductor without stripping | Zhijian Lu | 2004-05-25 |