Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822248 | Spatial phase locking with shaped electron beam lithography | Juan Ferrera, James G. Goodberlet, Timothy R. Groves, Mark K. Mondol, Mark Schattenburg +1 more | 2004-11-23 |
| 6818906 | Electron beam position reference system | Rodney A. Kendall, David J. Pinckney, Richard Rieland | 2004-11-16 |