Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818906 | Electron beam position reference system | John G. Hartley, Rodney A. Kendall, Richard Rieland | 2004-11-16 |
| 6806943 | Mask clamping device | Wayne A. Barringer, Joseph Santilli, Maris A. Sturans | 2004-10-19 |
| 6724001 | Electron beam lithography apparatus with self actuated vacuum bypass valve | Rodney A. Kendall | 2004-04-20 |