Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822248 | Spatial phase locking with shaped electron beam lithography | Juan Ferrera, James G. Goodberlet, Timothy R. Groves, John G. Hartley, Mark Schattenburg +1 more | 2004-11-23 |