Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812193 | Slurry for mechanical polishing (CMP) of metals and use thereof | Michael T. Brigham, Donald F. Canaperi, Michael A. Cobb, William J. Cote, Kenneth M. Davis +9 more | 2004-11-02 |
| 6800503 | MEMS encapsulated structure and method of making same | Joseph T. Kocis, Kevin S. Petrarca, Richard P. Volant, Seshadri Subbanna | 2004-10-05 |