Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6801827 | Overlay inspection apparatus for semiconductor substrate and method thereof | Yasuhiro Yoshitake, Toshiharu Miwa | 2004-10-05 |
| 6777159 | Method for forming polyimide pattern using photosensitive polyimide and composition for use therein | Hiroshi Itatani, Tarou Itatani, Tsunenori Sakamoto, Sucheta Gorwadkar, Masanori Komuro | 2004-08-17 |
| 6720117 | Exposure mask with appended mask error data | Yasuhiro Yoshitake, Takeshi Kato, Norio Hasegawa | 2004-04-13 |
| 6697698 | Overlay inspection apparatus for semiconductor substrate and method thereof | Yasuhiro Yoshitake, Toshiharu Miwa | 2004-02-24 |
| 6686107 | Method for producing a semiconductor device | Yasuhiro Yoshitake, Takeshi Kato, Norio Hasegawa | 2004-02-03 |