Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6792366 | Method and apparatus for inspecting defects in a semiconductor wafer | Naoki Hosoya, Yuuji Takagi, Kenji Obara | 2004-09-14 |
| 6792367 | Method and apparatus for inspecting defects in a semiconductor wafer | Naoki Hosoya, Yuuji Takagi, Kenji Obara | 2004-09-14 |
| 6741941 | Method and apparatus for analyzing defect information | Kenji Obara, Yuji Takagi | 2004-05-25 |