Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809032 | Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation using optical techniques | Frank Mauersberger, Peter J. Beckage, Paul R. Besser, Frederick N. Hause, William S. Brennan +1 more | 2004-10-26 |
| 6774053 | Method and structure for low-k dielectric constant applications | Cindy Goldberg, Yuri Solomentsev, Yeong-Jyh T. Lii | 2004-08-10 |