Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809032 | Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation using optical techniques | Frank Mauersberger, Peter J. Beckage, Paul R. Besser, Frederick N. Hause, Errol Todd Ryan +1 more | 2004-10-26 |
| 6800494 | Method and apparatus for controlling copper barrier/seed deposition processes | Howard E. Castle | 2004-10-05 |