Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809032 | Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation using optical techniques | Frank Mauersberger, Peter J. Beckage, Paul R. Besser, Errol Todd Ryan, William S. Brennan +1 more | 2004-10-26 |