Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828161 | Method of forming an FeRAM having a multi-layer hard mask and patterning thereof | Scott R. Summerfelt, Luigi Colombo, Theodore S. Moise, J. Scott Martin | 2004-12-07 |
| 6773930 | Method of forming an FeRAM capacitor having a bottom electrode diffusion barrier | Scott R. Summerfelt, Tomojuki Sakoda, Chiu Chi, Theodore S. Moise | 2004-08-10 |
| 6730354 | Forming ferroelectric Pb(Zr,Ti)O3 films | Stephen Roy Gilbert, Kaushal K. Singh, Stevan G. Hunter | 2004-05-04 |
| 6686236 | Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing | Stephen Roy Gilbert, Scott R. Summerfelt | 2004-02-03 |