Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6773930 | Method of forming an FeRAM capacitor having a bottom electrode diffusion barrier | Scott R. Summerfelt, Sanjeev Aggarwal, Tomojuki Sakoda, Theodore S. Moise | 2004-08-10 |
| 6767750 | Detection of AIOx ears for process control in FeRAM processing | Scott R. Summerfelt, Tomohuki Sakoda | 2004-07-27 |
| 6713342 | FeRAM sidewall diffusion barrier etch | Francis G. Celii, Scott R. Summerfelt, Tomoyuki Sakoda | 2004-03-30 |