Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6713342 | FeRAM sidewall diffusion barrier etch | Francis G. Celii, Scott R. Summerfelt, Chiu Chi | 2004-03-30 |
| 6692976 | Post-etch cleaning treatment | Laura Wills Mirkarimi, Stephen Roy Gilbert, Guoqiang Xing, Scott R. Summerfelt, Ted S. Moise | 2004-02-17 |