Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828225 | Substrate processing method | Fumio Kondo, Koji Mishima, Akira Tanaka, Tetsuji Togawa, Hiroaki Inoue | 2004-12-07 |
| 6790763 | Substrate processing method | Fumio Kondo, Koji Mishima, Akira Tanaka, Tetsuji Togawa, Hiroaki Inoue | 2004-09-14 |
| 6770109 | Substrate transport container | Akira Tanaka, Kazuo Okubo | 2004-08-03 |
| 6758876 | Substrate transport apparatus, pod and method | Akira Tanaka, Takashi Kishi | 2004-07-06 |
| D491725 | Container for transporting substrates | Akira Tanaka, Takashi Kishi | 2004-06-22 |
| 6752648 | Connector with slider detecting half-engagement | Motohisa Kashiyama | 2004-06-22 |
| 6723151 | Gas removal method and gas removal filter | Akira Tanaka, Takashi Kishi | 2004-04-20 |