Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829130 | Power supply apparatus for supplying electric power to substrate carrier container | Akira Tanaka | 2004-12-07 |
| 6758876 | Substrate transport apparatus, pod and method | Yoko Suzuki, Akira Tanaka | 2004-07-06 |
| D491725 | Container for transporting substrates | Akira Tanaka, Yoko Suzuki | 2004-06-22 |
| 6723151 | Gas removal method and gas removal filter | Akira Tanaka, Yoko Suzuki | 2004-04-20 |