Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828225 | Substrate processing method | Fumio Kondo, Koji Mishima, Akira Tanaka, Yoko Suzuki, Hiroaki Inoue | 2004-12-07 |
| 6790763 | Substrate processing method | Fumio Kondo, Koji Mishima, Akira Tanaka, Yoko Suzuki, Hiroaki Inoue | 2004-09-14 |
| 6783440 | Polishing apparatus | Osamu Nabeya | 2004-08-31 |
| 6682408 | Polishing apparatus | Kunihiko Sakurai, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2004-01-27 |