Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6784977 | Projection exposure system as well as a process for compensating image defects occuring in the projection optics of a projection exposure system, in particular for microlithography | Christian Hembd-Söllner, Hubert Holderer | 2004-08-31 |
| 6781668 | Optical arrangement | Karl-Heinz Schuster, Hubert Holderer, Christian Wagner, Jochen Becker, Stefan Xalter +1 more | 2004-08-24 |