Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6784977 | Projection exposure system as well as a process for compensating image defects occuring in the projection optics of a projection exposure system, in particular for microlithography | Rudolf Von Bünau, Christian Hembd-Söllner | 2004-08-31 |
| 6781668 | Optical arrangement | Karl-Heinz Schuster, Rudolf Von Bünau, Christian Wagner, Jochen Becker, Stefan Xalter +1 more | 2004-08-24 |
| 6744574 | Mount for an optical element in an optical imaging device | Ulrich Weber, Jochen Becker, Bernhard Gellrich, Jens Kugler | 2004-06-01 |
| 6728021 | Optical component and method of inducing a desired alteration of an optical property therein | Alexander Kohl | 2004-04-27 |