Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829279 | Laser oscillating apparatus, exposure apparatus using the same and device fabrication method | Tadahiro Ohmi, Nobumasa Suzuki, Hiroshi Ohsawa, Nobuyoshi Tanaka, Masaki Hirayama | 2004-12-07 |
| 6804285 | Gas supply path structure for a gas laser | Tadahiro Ohmi, Hiroshi Osawa, Nobuyoshi Tanaka, Kazuhide Ino, Yasuyuki Shirai +1 more | 2004-10-12 |
| 6801554 | Laser oscillating apparatus, exposure apparatus, and device fabrication method | Tadahiro Ohmi, Nobumasa Suzuki, Hiroshi Ohsawa, Nobuyoshi Tanaka, Masaki Hirayama | 2004-10-05 |
| 6744802 | Laser oscillating apparatus with slotted waveguide | Tadahiro Ohmi, Nobumasa Suzuki, Hiroshi Ohsawa, Nobuyoshi Tanaka, Masaki Hirayama | 2004-06-01 |