Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6804285 | Gas supply path structure for a gas laser | Tadahiro Ohmi, Hiroshi Osawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Yasuyuki Shirai +1 more | 2004-10-12 |
| 6719875 | Plasma process apparatus | Tadahiro Ohmi, Takahisa Nitta, Masaki Hirayama, Ryu Kaiwara | 2004-04-13 |