Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829279 | Laser oscillating apparatus, exposure apparatus using the same and device fabrication method | Tadahiro Ohmi, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Masaki Hirayama | 2004-12-07 |
| 6801554 | Laser oscillating apparatus, exposure apparatus, and device fabrication method | Tadahiro Ohmi, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Masaki Hirayama | 2004-10-05 |
| 6744802 | Laser oscillating apparatus with slotted waveguide | Tadahiro Ohmi, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Masaki Hirayama | 2004-06-01 |
| 6677549 | Plasma processing apparatus having permeable window covered with light shielding film | Shinzo Uchiyama, Hideo Kitagawa | 2004-01-13 |