Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6741331 | Lithographic apparatus with improved exposure area focus, device manufacturing method, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens, Hans Butler | 2004-05-25 |
| 6674510 | Off-axis levelling in lithographic projection apparatus | Johannes Christiaan Maria Jasper, Erik Roelof Loopstra, Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Nicolaas Antonius Allegondus Johannes Van Asten +5 more | 2004-01-06 |