Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819402 | System and method for laser beam expansion | James Tsacoyeanes | 2004-11-16 |
| 6813003 | Advanced illumination system for use in microlithography | Mark Oskotsky, Lev Ryzhikov, Scott Coston, James Tsacoyeanes | 2004-11-02 |
| 6775069 | Advanced illumination system for use in microlithography | Mark Oskotsky, Lev Ryzhikov, Scott Coston, James Tsacoyeanes, Peter Baumgartner | 2004-08-10 |