Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6813003 | Advanced illumination system for use in microlithography | Mark Oskotsky, Lev Ryzhikov, James Tsacoyeanes, Walter Augustyn | 2004-11-02 |
| 6784976 | System and method for improving line width control in a lithography device using an illumination system having pre-numerical aperture control | James Tsacoyeanes | 2004-08-31 |
| 6775069 | Advanced illumination system for use in microlithography | Mark Oskotsky, Lev Ryzhikov, James Tsacoyeanes, Peter Baumgartner, Walter Augustyn | 2004-08-10 |