Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819402 | System and method for laser beam expansion | Walter Augustyn | 2004-11-16 |
| 6813003 | Advanced illumination system for use in microlithography | Mark Oskotsky, Lev Ryzhikov, Scott Coston, Walter Augustyn | 2004-11-02 |
| 6784976 | System and method for improving line width control in a lithography device using an illumination system having pre-numerical aperture control | Scott Coston | 2004-08-31 |
| 6775069 | Advanced illumination system for use in microlithography | Mark Oskotsky, Lev Ryzhikov, Scott Coston, Peter Baumgartner, Walter Augustyn | 2004-08-10 |