Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824816 | Process for producing metal thin films by ALD | Titta Aaltonen, Petra Alén, Markku Leskelä | 2004-11-30 |
| 6706115 | Method for preparing metal nitride thin films | Markku Leskelä, Petra Alén, Marika Juppo | 2004-03-16 |