Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824816 | Process for producing metal thin films by ALD | Titta Aaltonen, Petra Alén, Mikko Ritala | 2004-11-30 |
| 6773550 | Method for coating webs | Stina Nygard, Maija Pitkänen | 2004-08-10 |
| 6706115 | Method for preparing metal nitride thin films | Mikko Ritala, Petra Alén, Marika Juppo | 2004-03-16 |