Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6706115 | Method for preparing metal nitride thin films | Markku Leskelä, Mikko Ritala, Petra Alén | 2004-03-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6706115 | Method for preparing metal nitride thin films | Markku Leskelä, Mikko Ritala, Petra Alén | 2004-03-16 |