Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829084 | Ultraviolet and vacuum ultraviolet antireflection substrate | Satoru Takaki, Kaname Okada | 2004-12-07 |
| 6795170 | Structure for attaching a pellicle to a photo-mask | Hitoshi Mishiro, Kaname Okada, Takayuki Kawahara, Morio Terakado | 2004-09-21 |
| 6744562 | Pellicle | Kaname Okada | 2004-06-01 |
| 6713200 | Pellicle and method of using the same | Hiroshi Arishima, Hitoshi Mishiro | 2004-03-30 |