Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829084 | Ultraviolet and vacuum ultraviolet antireflection substrate | Satoru Takaki, Shinya Kikugawa | 2004-12-07 |
| 6795170 | Structure for attaching a pellicle to a photo-mask | Hitoshi Mishiro, Shinya Kikugawa, Takayuki Kawahara, Morio Terakado | 2004-09-21 |
| 6744562 | Pellicle | Shinya Kikugawa | 2004-06-01 |