Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795170 | Structure for attaching a pellicle to a photo-mask | Shinya Kikugawa, Kaname Okada, Takayuki Kawahara, Morio Terakado | 2004-09-21 |
| 6713200 | Pellicle and method of using the same | Hiroshi Arishima, Shinya Kikugawa | 2004-03-30 |