Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6743714 | Low temperature integrated metallization process and apparatus | Hong Mei Zhang, Fusen Chen, Ted Guo, Liang-Yuh Chen | 2004-06-01 |
| 6726776 | Low temperature integrated metallization process and apparatus | Hong Mei Zhang, Fusen Chen, Ted Guo | 2004-04-27 |
| 6693030 | Reactive preclean prior to metallization for sub-quarter micron application | Suchitra Subrahmanyan, Liang-Yuh Chen | 2004-02-17 |