Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827978 | Deposition of tungsten films | Hyungsuk Alexander Yoon, Hongbin Fang | 2004-12-07 |
| 6809026 | Selective deposition of a barrier layer on a metal film | Hyungsuk Alexander Yoon, Hui Zhang, Soonil Hong, Ming Xi | 2004-10-26 |
| 6797340 | Method for depositing refractory metal layers employing sequential deposition techniques | Hongbin Fang, Hyung-Suk Yoon, Ken Kaung Lai, Chi C. Young, James Horng +2 more | 2004-09-28 |
| 6734020 | Valve control system for atomic layer deposition chamber | Siqing Lu, Yu-Chia Chang, Dongxi Sun, Vinh Dang, Anzhong Chang +2 more | 2004-05-11 |
| 6720027 | Cyclical deposition of a variable content titanium silicon nitride layer | Ming Xi | 2004-04-13 |
| 6699380 | Modular electrochemical processing system | Guan-Shian CHEN | 2004-03-02 |