Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734020 | Valve control system for atomic layer deposition chamber | Siqing Lu, Yu-Chia Chang, Dongxi Sun, Michael Yang, Anzhong Chang +2 more | 2004-05-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734020 | Valve control system for atomic layer deposition chamber | Siqing Lu, Yu-Chia Chang, Dongxi Sun, Michael Yang, Anzhong Chang +2 more | 2004-05-11 |