Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827978 | Deposition of tungsten films | Hongbin Fang, Michael Yang | 2004-12-07 |
| 6809026 | Selective deposition of a barrier layer on a metal film | Michael Yang, Hui Zhang, Soonil Hong, Ming Xi | 2004-10-26 |