Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805137 | Method for removing contamination particles from substrates | Reginald Hunter | 2004-10-19 |
| 6803998 | Ultra low cost position and status monitoring using fiber optic delay lines | Reginald Hunter | 2004-10-12 |
| 6779226 | Factory interface particle removal platform | Reginald Hunter | 2004-08-24 |
| 6725564 | Processing platform with integrated particle removal system | Reginald Hunter | 2004-04-27 |
| 6684523 | Particle removal apparatus | Reginald Hunter, Steven Gianoulakis | 2004-02-03 |
| 6676800 | Particle contamination cleaning from substrates using plasmas, reactive gases, and mechanical agitation | John J. Festa, Darryl A. Bennett, Lawrence J. Overzet, Marwan H. Khater, Siva Kanakasabapathy | 2004-01-13 |