Issued Patents 2004
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6813032 | Method and apparatus for enhanced embedded substrate inspection through process data collection and substrate imaging techniques | — | 2004-11-02 |
| 6805137 | Method for removing contamination particles from substrates | Joel Brad Bailey | 2004-10-19 |
| 6803998 | Ultra low cost position and status monitoring using fiber optic delay lines | Joel Brad Bailey | 2004-10-12 |
| 6779226 | Factory interface particle removal platform | Joel Brad Bailey | 2004-08-24 |
| 6725564 | Processing platform with integrated particle removal system | Joel Brad Bailey | 2004-04-27 |
| 6721045 | Method and apparatus to provide embedded substrate process monitoring through consolidation of multiple process inspection techniques | — | 2004-04-13 |
| 6707545 | Optical signal routing method and apparatus providing multiple inspection collection points on semiconductor manufacturing systems | — | 2004-03-16 |
| 6707544 | Particle detection and embedded vision system to enhance substrate yield and throughput | Sagie Tsadka | 2004-03-16 |
| 6697517 | Particle detection and embedded vision system to enhance substrate yield and throughput | — | 2004-02-24 |
| 6693708 | Method and apparatus for substrate surface inspection using spectral profiling techniques | — | 2004-02-17 |
| 6684523 | Particle removal apparatus | Joel Brad Bailey, Steven Gianoulakis | 2004-02-03 |
| 6677166 | Method for confirming alignment of a substrate support mechanism in a semiconductor processing system | — | 2004-01-13 |