Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6676800 | Particle contamination cleaning from substrates using plasmas, reactive gases, and mechanical agitation | John J. Festa, Darryl A. Bennett, Joel Brad Bailey, Lawrence J. Overzet, Siva Kanakasabapathy | 2004-01-13 |