Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818096 | Plasma reactor electrode | Michael Barnes | 2004-11-16 |
| 6692903 | Substrate cleaning apparatus and method | Haojiang Chen, James S. Papanu, Mark Kawaguchi, Harald Herchen, Jeng H. Hwang +1 more | 2004-02-17 |