Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828240 | Method of manufacturing multi-level contacts by sizing of contact sizes in integrated circuits | Massud Aminpur | 2004-12-07 |
| 6703297 | Method of removing inorganic gate antireflective coating after spacer formation | — | 2004-03-09 |
| 6699641 | Photosensitive bottom anti-reflective coating | Massud Aminpur | 2004-03-02 |
| 6696334 | Method for formation of a differential offset spacer | Srikanteswara Dakshina-Murthy, Christoph Schwan | 2004-02-24 |
| 6673635 | Method for alignment mark formation for a shallow trench isolation process | Douglas J. Bonser, Srikanteswara Dakshina-Murthy | 2004-01-06 |