Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795198 | Method and device for measuring thin films and semiconductor substrates using reflection mode geometry | Matthew Banet, Keith A. Nelson, John A. Rogers | 2004-09-21 |
| 6734982 | Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure | Matthew Banet, John A. Rogers | 2004-05-11 |