Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6506098 | Self-cleaning slurry arm on a CMP tool | Hu Fu Dao Ho, Yeong Shiang Hu, Simon Shu, Ben Liu, Jing Lin | 2003-01-14 |
YL
Ying Liu
Overall (2003): #87,926 of 273,478Top 35%
1
Patents 2003