Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6506098 | Self-cleaning slurry arm on a CMP tool | Hu Fu Dao Ho, Ying Liu, Yeong Shiang Hu, Ben Liu, Jing Lin | 2003-01-14 |
SS
Simon Shu
Overall (2003): #117,615 of 273,478Top 45%
1
Patents 2003