Yeong Shiang Hu

TSMC: 1 patents #218 of 754Top 30%

Overall (2003): #88,227 of 273,478Top 35%

Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
6506098	Self-cleaning slurry arm on a CMP tool	Hu Fu Dao Ho, Ying Liu, Simon Shu, Ben Liu, Jing Lin	2003-01-14