Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555466 | Two-step chemical-mechanical planarization for damascene structures on semiconductor wafers | Thomas Laursen, Malcolm Grief, Sanjay Basak | 2003-04-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555466 | Two-step chemical-mechanical planarization for damascene structures on semiconductor wafers | Thomas Laursen, Malcolm Grief, Sanjay Basak | 2003-04-29 |